1、目錄摘要.…，.................................……，............................................……，……，.........……日第一章緒論..........................……，...............................……，...................................……11.1國(guó)外工業(yè)激光

2、加工現(xiàn)狀與趨勢(shì)..............................……，...........................……11.2國(guó)內(nèi)工業(yè)激光加工現(xiàn)狀與趨勢(shì)............……，....……，..................................……31.3本文的主要研究?jī)?nèi)容.......................……，.....................................

3、.............……41.4本文的章節(jié)安排........................................................................................……5第二章激光加工系統(tǒng)......................................……，...............................................……62.1

4、激光加工方式...……，.................................................................……，.....……62.2激光偏轉(zhuǎn)掃描系統(tǒng)特點(diǎn)...................……，..................................................……82.3激光偏轉(zhuǎn)掃描系統(tǒng)原理...............................

5、.............................................……9第三章動(dòng)態(tài)聚焦模塊..........................................................................................……123.1誤差產(chǎn)生及其補(bǔ)償機(jī)理........................................................

6、................……123.2動(dòng)態(tài)聚焦模塊光學(xué)系統(tǒng)..........................................................................……153.3動(dòng)態(tài)聚焦模塊機(jī)械結(jié)構(gòu)..........................................................................……173.4PSD伺服控制........

7、.....................................……，.......................................……193.5動(dòng)態(tài)聚焦運(yùn)動(dòng)控制..................................................................................……22第四章系統(tǒng)控制算法及圖形校正..........................

8、..............................……，.......……254.1掃描控制算法……，.................................................................................……254.2圖形校正.......................................……‘..................……，.........

9、.................……26第五章控制模塊..................................................................................................……315.1激光器的控制模式...................................……，........................................…

10、…315.2控制軟件模塊及接口硬件....................................................................……325.3RTC4運(yùn)動(dòng)控制卡..............................……，................................................……36第六章成果應(yīng)用及今后的打算.....................

11、.....................................................……40參考文獻(xiàn)................................................................................................................……41致謝.........................................

12、.......................................................................……43AbstractLaserwithhigheoherenee，direetion，highintensityeharaeteristies，it15easytoobtainahighfluxdensity，theintensityoftheIaserbeamfoeustothemedia，

13、theuseoflaserbeaminteraetionwithmattertoehangethenatureofthematerialProeess，whieh15laserProeessing.LaserProCeSSingteChnologywiththeOPtiCal，eleetriealandmeehanieal，materials，eomPuters，eontrolteehnologyhasgraduallydeVeloPe

14、dintoanewProeessingteehnology.WideobjeCtwithaProeessinglaserProCessing，deformation，highPreeision，energysaving，lessPollution，remoteProeessing，automatedProeessingandother5igni行eantadvantages，toimProveProduetqualityandIabor

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17、treatment，Iasermarking，laserengraVing，and50hasbeenwidelyUSed.High一Powerlaserbeamscanningsystem15anewgenerationofindUStrialgradehighPowerIaserProeessingsystemintheadvaneedmanUfaeturingindustrykeytothesueeessofaPPlieation，

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20、geostsneeds.ForhighPowerlaserProeessingsystemofdomestiedemandgrowthandthe1imitationsinthePraetiCalaPPliCationofresearehanddevel0Pmentoftheintelligentmodulebasedondynamiefoeusforlaserde月eetionseanningsystem.A「oundthenewge

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