1、電子科技大學碩士學位論文鐵電疇的掃描力顯微鏡檢測方法研究姓名：李松霞申請學位級別：碩士專業(yè)：材料學指導教師：包生祥20030101電子科技大學碩士學位論文AbstractDomainstructureanditsmovementdeterminethephysicalpropertiesof介rroelectrics.lmcstigationofdomainsisthepreconditiontostudymacroscopicprop

2、ertiesofferroelectrics.Therearemanymethodstoinvestigatedomains.suchaspolarizationmicroscopy.scantingelectronmicroscopytransmissionelectronmicroscopy.scanningelectronacousticmicroscopyandsoon.Howeverthesemethodssufferfrom

3、someseriousdisandvertagesinvolvingcomplexsamplepreparationdamagetosamplelowresolution.SanningForceMicroscopy(SFN4)whichrootsfromatomicforcemicroscopyisageneraldesignationofmicroscopyrelatingtoforcebehavoirtechnology.Beca

4、useofitssimpleoperationhighresolutionwithouttheneedforspecialsamplepreparationSFMispaidgreatatentioninallscientificfields.SFMisaneffectivemethodtostudydomainswithhighresolutionandnondestructivemeasureing.Thispaperstudies

5、theinvestigationmethodsofdoaminusingvoltagemodulatedSFM.DifferentprinciplesandmodesofSFMarediscussed.TheimagingprincipleofpiezoresponseatomicforcemicroscopyscanningnonlineardielectmicroscopyKelvinforcemicroscopyaretheore

6、ticallyanalysedandtheinfluenceofvoltagecontactforceandmicrocantileveronthedomaininvestigationisstudied.Theparametersofinstrumentareoptimizedusingthesamesample.AndtheresultisthatthedomainstructureofPMNPTcanbeachievedsuces

7、sfullyusingDF3RmicrocantileverwhenVac3Vfl=S20kHz.Differentcantileversandelectricfieldsarestudiedrespectivelyinordertoweakenandeveneliminatetheeffectofelectrostaicforce.Theresultsshowthattheinfluenceofelectrostaticcanbedi

8、minishedeffectivelywhenusingcantileverwithhighspringcoefficient.Theworkprovidesnotonlythefoundationofstudyingdomainstructureinferroelectricthinfilmsbutalsothemeansofstudyingfatigueandpolarizationretentioninferroelctric.K