1、華北電力大學(xué)碩士學(xué)位論文摘要諧振式微機(jī)械壓力傳感器是通過檢測其機(jī)械諧振器諧振頻率的變化來實(shí)現(xiàn)壓力測量，特點(diǎn)是尺寸小，精度高，穩(wěn)定性好，易與數(shù)字電路接口，具有廣闊的應(yīng)用前景。精確測量是微機(jī)械壓力傳感器研究的目標(biāo)，檢測電路的性能優(yōu)劣直接影響整一體器件測量效果，本論文主要針對諧振式微機(jī)械壓力傳感器檢測電路展開研究。論文分析了微機(jī)械壓力傳感器的結(jié)構(gòu)和工作原理，給出了檢測電路的整體設(shè)計方案，并設(shè)計了閉環(huán)激勵電路和差分檢測電路，制作了PCB板分析了

2、微機(jī)械壓力傳感器同頻干擾因素，并設(shè)計了一種雙端非對稱激勵的同頻干擾消除電路分析了微機(jī)械壓力傳感器的溫度漂移，給出了溫度補(bǔ)償?shù)姆桨?。上述研究成果為微機(jī)械壓力傳感器的進(jìn)一步工作奠定了基礎(chǔ)。關(guān)鍵詞:諧振式微機(jī)械壓力傳感器，檢測電路，同頻干擾，溫度補(bǔ)償ABSTRACTAresonantmiero一machinedPressuresensormeasurestheapPliedPressurebydeteetingthechangeofreson

3、antfrequeneyofitsmeehanicalresonator.Thesensor15eharaeterizedbyitsverysmallsize，highaecuraey，exeellentstabilityandeonvenientinterfaeingwithdigitaleleetronies，showingbroadapPlieationProsPeets.Exactmeasurement15thePurPoseo

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5、alexeitationtoeliminatetheco一ehannelinterferencewasintrodueedbasedontheanalisisofnosie.Attheendofthethesis，amethodoftemPeratureeomPensatingwasintrodueed.AlloftheabovemethodswillPromotethedeveloPmentofmiero一machinedPressu

6、resensor.ZhaoJinmin(signalandinfmationProcessing)DirectedbyProf.HaoJianhongLiShourongKEYWORDS:resonantmiero一maehinedPressuresensor，deteetioneireuit，eo一channelinterference，temPeraturecolnPensation華北電力大學(xué)碩士學(xué)位論文3.4.4諧振式微機(jī)械壓力

7、傳感器頻率穩(wěn)定性測試...........................……283.5本章小結(jié)........................................................................................……30第四章諧振式微機(jī)械壓力傳感器同頻干擾的消除與溫度補(bǔ)償.…，.…，........……314.1諧振式微機(jī)械壓力傳感器尚頻干擾的分析與消除............

8、.............……314.1.1集成運(yùn)算放大器的噪聲及減小噪聲的措施...........................……314.1.2同頻干擾噪聲的建模............................................................……324.1.3同頻干擾的消除...........................................................

9、.........……334.1.3.1雙端對稱差分激勵......................................................……334.1.3.2雙端不對稱激勵...........……、........................................……344.1.4實(shí)驗(yàn)結(jié)果與討論..................................................

10、.................……354.2諧振式微機(jī)械壓力傳感器的溫度補(bǔ)償............................................……364.2.1諧振式微機(jī)械壓力傳感器溫度特性分析....……:...................……364.2.2諧振式微機(jī)械壓力傳感器的溫度補(bǔ)償..................................……374.3本章小結(jié).…，...........

11、........................................................................……39第五章總結(jié).............................……，.....……，...............................................……405.1工作總結(jié).........................................

12、……，........................................……405.2未來工作展望........................................................……，.................……40參考文獻(xiàn)..................................……!.....……，.……、二、.，……，........................