1、西北工業(yè)大學(xué)碩士學(xué)位論文MEMSCAD器件級宏模型獲取技術(shù)姓名：閆子健申請學(xué)位級別：碩士專業(yè)：微機電系統(tǒng)與納米技術(shù)指導(dǎo)教師：苑偉政20070301登!i：；些叁蘭些!：蘭絲絲蘭皇皇壘!些!：!AbstractWithgreatdevelopmentinMEMSfieldtheMEMSdevicesaremoreandmorecomplexComputeraideddesign(CAD)toolsarethusneededtosuppor

2、trapidmodelingandsimulationofthesystem—levelbehaviorsofMEMSInrecentyears，MEMSdesigntechniquehasbeenwellstudiedanddevelopedundertheguidelineofstructuredesignmethodButthegapbetweensystem—levelsimulationandphysicallevelsimu

3、lationstillexist，forthedevice—levelmacromodelingtechnologyhaslaggardlyprogressedSoitwillbesignificanttoimprovetheMEMSCADtechniqueforthisthesisfocusonthepracticalmacromodelingtechnologyandautomatedmacromodelingsoftwareAim

4、ingattherequirementsoffastsystem—levelmodelingandsimulationandthecharacteristicsofmultipleenergydomainsinteraction，thispaperhasbeeninvestigatedthemacromodelingmethodology，alsesearchedtheKrylovsubspacebasedprojectmethodan

5、dautomatedmacromodelingSOftwareframeworkObtainingmacromodelwithdisposingtheresultfilesofphysical1evelsimulationandthenpackagingittothesubsystembehavioralmodelIttransformedphysicalmodeltosystemmodelThiskindofmacromodelcan

6、beconnectedwithMulti—PortElementmodel，enrichingthesystemmodelingmethod，alsorecuperatingtheshol’tageofanalyticalmodelFirstly，basedonstructuredesignmethodthegapbetweenphysicallevelandsystemIevelsimulationhasbeenanalyzedByo

7、btainingdevicemacromodelcallrecuperatethisgap，alsoseveralmethodologiesofmacrodelinghavebeeninvestigatedInreferencetocontroltheory，someprincipleandcharacteristicsofKrylovsubspaceprojectionbasedalgorithmhavebeendetailanaly

8、zed，whichmaybeusedinMEMSCADtoolsasautomatedmacrodelingprocessMeanwhiletwotypicalMEMSdevicesincludingmicresonatorandZaxisaccelerometerhavebeenmacromodeledasblackboxmodelwhichcanbeconnectedwithMultiPort—ElementmodelThesetw

9、omodelsbothhavebeencomparedwithfiniteelementanalysisandsystemlevelsimulationusingMulti—Port—ElementNetwork(MuPEN)modelThedetailsaboutaccuracyandefficiencyhavebeenvalidated，alsotheprocessandrealizationframeworkoftheautoma

10、tedmacrodelingsoftwarehavebeendiscussedFinallysummarizedthisthesisandseveraladviceaboutimprovingmodeJorderreductionalgorithmandoptimizingtheautomatedmacrodelingsoftwarehasbeenproposedKeywords：MEMS，Device—level，Macromodel