1、中南民族大學碩士學位論文硬質合金刃具輝光沉積TiN涂層的工藝研究姓名：韋世良申請學位級別：碩士專業(yè)：等離子體物理指導教師：何翔20090501硬質合金刃具輝光沉積TiN涂層的工藝研究IIAbstractAbstractHighspeedcuttingdrycuttingwillbecomethemaintrendofthemetalcuttingwhichputfwardhighappealoncuttingtoolsperfmance

2、.Itisanavailabilityapproachtoadvancecuttingtoolscolligateperfmancethatdepositionhardnesscoatingsonpreferabletenacitytoolssubstrate.DepositionhardnesscoatingsonhardalloycuttingtoolsbyMultiarcionplatingwaswidelyusedinindus

3、tryareabuttheequipmentisveryexpensive.ThisresearchfocusthatdepositedTiNcoatingsonhardalloytools(YG8)bydoubleglowdisgehollowcathodedisge.Thesamplepretreatmentflowwasconstituted.Theshapeofsourceofdoubleglowdisgecathodeofho

4、llowcathodedisgeweredesignedmeoverresearchedonthedepositionTiNcoatingstechnics.thefmmechanismofdepositioncoatingsbydoubleglowdisgewasdiscussed.TheTiNcoatingswereresearchedbyappearancemicrostructuremicrohardnessXRDXPS.The

5、perfecttechnicsparameterbydoubleglowdisgedepositionTiNcoatingswere:distanceofsourcecathode:10~12mmsubstratetemperature:750~850℃pressure:280~340Paelectricityofsourcepolar:U:900~950V、I:1~1.2A、D:75~85%electricityofcathodepo

6、lar:U:580~650V、I:0.5~0.6A、D:60~75%.Allthesamplesappeared“edgedominooffect”indifferenttechnicsconditionsthetiptopmicrohardnessofTiNcoatingsreached2300HV0.05.TheTiNcoatingswereresearchedbyXRDwhichdepositionbydoubleglowdisg

7、eshowedthatthecoatingsnotonlycontainTiNphasebutalsocontainaspotofTi2NphaseTisinglematter.ThedistributingofTiNphaseatdifferentcrystalsidedependonsubstratetemperature.TiNphasehasedgrowthdirectionon(200)crystalsidewhenthete

8、mperatureofsubstratelowness(500~650℃).Furthermeitsdiffractionapiceswidenedthegrainsizeattenuateditsdiameterwas16.0952nm.Whenthetemperatureofsubstratehighness(650~850℃)TiNphasehadnotedgrowthitsaveragediameterwasbetween26n

9、mto31nm.XPSresearchshowedthattheatomratioofTiNosculationdependonpressure.TheatomratioofTiNwere1:1.171:1.92whenpressureapplied240~260Pa330~350Pa.NamelythehigherpressurethemeNcontentintheTiNcoatings.TheTiNcoatingsaveragemi