1、東北大學碩士學位論文全自動石英晶片分類機回轉(zhuǎn)臺動態(tài)傾角測試系統(tǒng)的研制姓名：于勇申請學位級別：碩士專業(yè)：機械電子工程指導教師：張鐳20070101東北大學碩士學位論文AbstraetTheResearchandDesignofDynamicDriftAngleMeasureSystemofTurningPlatformofFull—automaticSortingMachineofQuartzWaferAbstractQuartzwafe

2、rispopularusedinmanyfieldsofmanyelectronicsapplicationsForexample，allsituationsforusingMCUneedquartzwafertokeepsystematnormalfrequencyIfthecutanglesofquartzwaferisverynicetythenthesystemwillworkalnormalfrequencySothemeas

3、ureofthecutanglesofquartz、】I婦isgreatlyimportantTraditionalanglemeasllremachinebyXrayisunabletomeasureroundquartzwaferfortheroundquartzwafercannotearmarkitsXaxisItisfull—automaticsortingmachineofquartzwaferbyX—myofEFGofGe

4、rmanthatcallmeasurethecutanglesofquartzwaferofrandomshapesThekeycomponentofthismachineisahi【ghprecisionturningplatformThehighprecisionturningplatformnotonlyCanlongstabilework，butalsoitsdriftanglemustundersecondItisunreal

5、istictoputallhopeonmechanicalprecisionoflli曲precisionturningplatformAndthathaveagreatcostFormeetingofneedofdynamicprecisionofturningplatformdynamicmeasuringinstantaneousdriftangleerroristhemostavailablemethod，andcompensa

6、tedynamicprecisionofturningplatformIfadoptcontactingmeasljre，thenthemeorewilldisturbtheprocessofturningplatformanditmayscullsurfaceofthetumingplatformThistaskdevelopauntouehdynamicdriftangleme鶴uresystemofturningplatformb

7、asedoIllaserCCDtechnologyforcooperatingtheneedofdevelopingfullautomaticsortingmachineofquartzwaferbyXrayinhomelandThedynamicdriftanglemeasuresystemCancompensatethemeasoreresultofcutanglesofquartzwafer，therebyCallnicetyme

8、asurecutanglesofquartz、vafbrCCDisaimagesensorIthasmanycharacteristicsinineeptingandrecordingofimageinformationAndithasmanymerits，forexamplesmallvolume，smallconsume，hilghdistinguishabilityandhighdelicacyeteSoitisbroadlyap

9、pliedinthefieldofhighprecisionnleasurcLaserCCDmeasuretechnologyisthemainandimportantmethodinthefieldofmodernmeasuretechnologyIthasmanycharacteristicsasuntouchmeasllre，highdelicacy，highefficiencyereItisoneofthemostadvance

10、measoretechnologiesThispaperhasthreemainparts：thedesignofprojectofmeasuresystemthecollectionanddisposalofdatatheameliorationofhi【ghprecisionturningplatformInthepartofthedesignofprojectofmeasuresystemafteranalyzedthechara