1、<p>　　附件1：外文資料翻譯譯文</p><p><b>　　傳感器新技術的發(fā)展</b></p><p>　　傳感器是一種能將物理量、化學量、生物量等轉換成電信號的器件。輸出信號有不同形式，如電壓、電流、頻率、脈沖等，能滿足信息傳輸、處理、記錄、顯示、控制要求，是自動檢測系統(tǒng)和自動控制系統(tǒng)中不可缺少的元件。如果把計算機比作大腦，那么傳感器則相當于五官，傳

2、感器能正確感受被測量并轉換成相應輸出量，對系統(tǒng)的質量起決定性作用。自動化程度越高，系統(tǒng)對傳感器要求越高。在今天的信息時代里，信息產(chǎn)業(yè)包括信息采集、傳輸、處理三部分，即傳感技術、通信技術、計算機技術?，F(xiàn)代的計算機技術和通信技術由于超大規(guī)模集成電路的飛速發(fā)展，而已經(jīng)充分發(fā)達后，不僅對傳感器的精度、可靠性、響應速度、獲取的信息量要求越來越高，還要求其成本低廉且使用方便。顯然傳統(tǒng)傳感器因功能、特性、體積、成本等已難以滿足而逐漸被淘汰。世界許多發(fā)

3、達國家都在加快對傳感器新技術的研究與開發(fā)，并且都已取得極大的突破。如今傳感器新技術的發(fā)展，主要有以下幾個方面：</p><p>　　利用物理現(xiàn)象、化學反應、生物效應作為傳感器原理，所以研究發(fā)現(xiàn)新現(xiàn)象與新效應是傳感器技術發(fā)展的重要工作，是研究開發(fā)新型傳感器的基礎。日本夏普公司利用超導技術研制成功高溫超導磁性傳感器，是傳感器技術的重大突破，其靈敏度高，僅次于超導量子干涉器件。它的制造工藝遠比超導量子干涉器件簡單?？捎?/p>

4、于磁成像技術，有廣泛推廣價值。</p><p>　　利用抗體和抗原在電極表面上相遇復合時，會引起電極電位的變化，利用這一現(xiàn)象可制出免疫傳感器。用這種抗體制成的免疫傳感器可對某生物體內是否有這種抗原作檢查。如用肝炎病毒抗體可檢查某人是否患有肝炎，起到快速、準確作用。美國加州大學巳研制出這類傳感器。</p><p>　　傳感器材料是傳感器技術的重要基礎，由于材料科學進步，人們可制造出各種新型傳

5、感器。例如用高分子聚合物薄膜制成溫度傳感器；光導纖維能制成壓力、流量、溫度、位移等多種傳感器；用陶瓷制成壓力傳感器。高分子聚合物能隨周圍環(huán)境的相對濕度大小成比例地吸附和釋放水分子。高分子電介常數(shù)小，水分子能提高聚合物的介電常數(shù)。將高分子電介質做成電容器，測定電容容量的變化，即可得出相對濕度。利用這個原理制成等離子聚合法聚苯乙烯薄膜溫度傳感器，其有以下特點：測濕范圍寬；溫度范圍寬，可達-400℃～+1500℃；響應速度快，小于1S；尺寸小

6、，可用于小空間測濕；溫度系數(shù)小。 </p><p>　　陶瓷電容式壓力傳感器是一種無中介液的干式壓力傳感器。采用先進的陶瓷技術和厚膜電子技術，其技術性能穩(wěn)定，年漂移量小于0.1%F.S,溫漂小于±0.15%/10K,抗過載強,可達量程的數(shù)百倍。測量范圍可從0到60mpa。德國E+H公司和美國Kahlo公司產(chǎn)品處于領先地位。</p><p>　　光導纖維的應用是傳感材料的

7、重大突破，其最早用于光通信技術。在光通信利用中發(fā)現(xiàn)當溫度、壓力、電場、磁場等環(huán)境條件變化時，引起光纖傳輸?shù)墓獠◤姸?、相位、頻率、偏振態(tài)等變化，測量光波量的變化，就可知道導致這些光波量變化的溫度、壓力、電場、磁場等物理量的大小，利用這些原理可研制出光導纖維傳感器。光纖傳感器與傳統(tǒng)傳感器相比有許多特點：靈敏度高，結構簡單、體積小、耐腐蝕、電絕緣性好、光路可彎曲、便于實現(xiàn)遙測等。光纖傳感器日本處于先進水平。如Idec Izumi公司

8、和Suns公司。光纖傳感受器與集成光路技術相結合，加速光纖傳感器技術的發(fā)展。將集成光路器件代替原有 光學元件和無源光器件，使光纖傳感器有高的帶寬、低的信號處理電壓，可靠性高，成本低。</p><p>　　半導體技術中的加工方法有氧化、光刻、擴散、沉積、平面電子工藝，各向導性腐蝕及蒸鍍，濺射薄膜等，這些都已引進到傳感器制造。因而產(chǎn)生了各種新型傳感器，如利用半導體技術制造出硅微傳感器，利用薄膜工藝制造出快速

9、響應的氣敏、濕敏傳感器，利用濺射薄膜工藝制壓力傳感器等。</p><p>　　日本橫河公司利用各向導性腐蝕技術進行高精度三維加工，制成全硅諧振式壓力傳感器。核心部分由感壓硅膜片和硅膜片上面制作的兩個諧振梁結成，兩個諧振梁的頻差對應不同的壓力，用頻率差的方法測壓力，可消除環(huán)境溫度等因素帶來的誤差。當環(huán)境溫度變化時，兩個諧振梁頻率和幅度變化相同，將兩個頻率差后，其相同變化量就能夠相互抵消。其測量最高精度可達0.01%

10、FS。</p><p>　　美國Silicon Microstructure Inc.(SMI)公司開發(fā)一系列低價位,線性度在0.1%到0.65%范圍內的硅微壓力傳感器,最低滿量程為0.15psi(1KPa),其以硅為材料制成,具有獨特的三維結構,輕細微機械加工,和多次蝕刻制成惠斯登電橋于硅膜片上,當硅片上方受力時,其產(chǎn)生變形,電阻產(chǎn)生壓阻效應而失去電橋平衡,輸出與壓力成比例的電信號.象這樣的

11、硅微傳感器是當今傳感器發(fā)展的前沿技術,其基本特點是敏感元件體積為微米量級,是傳統(tǒng)傳感器的幾十、幾百分之一。在工業(yè)控制、航空航天領域、生物醫(yī)學等方面有重要的作用，如飛機上利用可減輕飛機重量，減少能源。另一特點是能敏感微小被測量，可制成血壓壓力傳感器。 中國航空總公司北京測控技術研究所，研制的CYJ系列濺謝膜壓力傳感器是采用離子濺射工藝加工成金屬應變計，它克服了非金屬式應變計易受溫度影響的不足，具有高穩(wěn)定性，適用于各種場合，被測介質

12、范圍寬，還克服了傳統(tǒng)粘貼式帶來的精度低、遲滯大、蠕變等缺點，具有精度高、可靠性高、體積小的特點，廣泛用于航空、石油、化工、醫(yī)療等領域。 </p><p>　　集成傳感器的優(yōu)勢是傳統(tǒng)傳感器無法達到的，它不僅僅是一個簡單的傳感器，其將輔助電路中的元件與傳感元件同時集成在一塊芯片上，使之具有校準、補償、自診斷和網(wǎng)絡通信的功能，它可降低成本、增加產(chǎn)量，美國LUCAS、NOVASENSOR公司開發(fā)的這種血壓傳感器

13、，每星期能生產(chǎn)1萬只。</p><p>　　智能化傳感器是一種帶微處理器的傳感器，是微型計算機和傳感器相結合的成果，它兼有檢測、判斷和信息處理功能，與傳統(tǒng)傳感器相比有很多特點：</p><p>　　具有判斷和信息處理功能，能對測量值進行修正、誤差補償，因而提高測量精度； </p><p>　　可實現(xiàn)多傳感器多參數(shù)測量； </p>&

14、lt;p>　　有自診斷和自校準功能，提高可靠性； </p><p>　　測量數(shù)據(jù)可存取，使用方便；</p><p>　　有數(shù)據(jù)通信接口，能與微型計算機直接通信。</p><p>　　把傳感器、信號調節(jié)電路、單片機集成在一芯片上形成超大規(guī)模集成化的高級智能傳感器。美國HONY WELL公司ST-3000型智能傳感器，芯片尺寸才有3×

15、4×2mm3，采用半導體工藝，在同一芯片上制成CPU、EPROM、靜壓、壓差、溫度等三種敏感元件。</p><p>　　智能化傳感器的研究與開發(fā)，美國處于領先地位。美國宇航局在開發(fā)宇宙飛船時稱這種傳感器為靈巧傳感器（Smart Sensor），在宇宙飛船上這種傳感器是非常重要的。我國在這方面的研究與開發(fā)還很落后，主要是因為我國半導體集成電路工藝水平有限。</p><p>

16、;　　傳感器的發(fā)展日新月異，特別是80年代人類由高度工業(yè)化進入信息時代以來，傳感器技術向更新、更高的技術發(fā)展。美國、日本等發(fā)達國家的傳感器技術發(fā)展最快，我國由于基礎薄弱，傳感器技術與這些發(fā)達國家相比有較大的差距。因此，我們應該加大對傳感器技術研究、開發(fā)的投入，使我國傳感器技術與外國差距縮短，促進我國儀器儀表工業(yè)和自化化技術的發(fā)展。</p><p><b>　　附件2：外文原文</b><

17、/p><p>　　Development of Sensor New Technology</p><p>　　Sensor is one kind component which can transform the physical quantity, chemistry quantity and the biomass into electrical

18、 signal. The output signal has the different forms like the voltage, the electric current, the frequency, the pulse and so on, which can satisfy the signal transmission, processing, recording, and demonstration and contr

19、ol demands. So it is the automatic detection system and in the automatic control industry .If automatic Technology is used wider, then sensor is more importan</p><p>　　Using the physical phenomenon, the chem

20、ical reaction, the biological effect as the sensor principle therefore the researches which discovered the new phenomenon and the new effect are the sensor technological improving ways .it is important studies to develop

21、ed new sensor’s the foundation. Japanese Sharp Corporation uses the superconductivity technology to develop successfully the high temperature superconductivity magnetic sensor and get the sensor technology significant br

22、eakthrough. Its sensi</p><p>　　Using the immune body and the antigen meets one another compound when the electrode surface. It can cause the electrode potential change and use this phenomenon to be possible

23、to generate the immunity sensor. The immunity sensor makes with this kind of immune body may to some organism in whether has this kind of ant original work inspection. Like may inspect somebody with the hepatitis virus i

24、mmune body whether contracts the hepatitis, plays to is fast, the accurate role. The US UC sixth branch </p><p>　　The sensor material is the important foundation for sensor technology, because the materials

25、science is progressive and the people may make each kind of new sensor For example making the temperature sensor with the high polymer thin film; The optical fiber can make the pressure, the current capacity, the tempera

26、ture, the displacement and so on the many kinds of sensors; Making the pressure transmitter with the ceramics. The high polymer can become the proportion adsorption and the release hydrog</p><p>　　Measured t

27、he wet scope is wide; The temperature range is wide, may reach -400 ℃ ~ +1,500 ℃; The speed of response is quick, is smaller than 1S; The size is small, may use in the small space measuring wet; The temperature coefficie

28、nt is small.</p><p>　　The ceramic electric capacity type pressure transmitter is one kind does not have the intermediary fluid the dry type pressure transmitter. Uses the advanced ceramic technology, the hea

29、vy film electronic technology, its technical performance is stable, the year drifting quantity is smaller than 0.1%F.S, warm floats is smaller than ±0.15%/10K, anti- overloads strongly, may reach the measuring range

30、 several hundred times. The survey scope may from 0 to 60mpa.German E+H Corporation and the American</p><p>　　The optical fiber application is send the material significant breakthrough, its uses in most ear

31、ly the optical communication techniques. In the optical communication use discovered works as environmental condition change and so on the temperature, pres-sure, electric field, magnetic field, causes the fiber optic tr

32、ansmission light wave intensity, the phase, the frequency, change and so on the polarization condition, the survey light wave quantity change, may know causes these light wave physica</p><p>　　In semiconduct

33、or technology processing method oxygenation, the photo etc hang, the proliferation, the deposition, the plane electron craft, various guides corrosion and steams plates, the sputtering thin film and so on, these have all

34、 introduced to the sensor manufacture. Thus has produced each kind of new sensor, like makes the silicon micro sensor using the semiconductor technology, makes the fast response using the thin film craft the gas to be se

35、nsitive, the wet sensitive sensor, the use spu</p><p>　　The Japanese horizontal river company uses various guides’ corrosion technology to carry on the high accuracy three dimensional processing; the system

36、helps the silicon resonance type pressure transmitter. The core partially presses two resonant Liang by the feeling which above the silicon diaphragm and the silicon diaphragm manufactures to form, two resonant Liang'

37、;s frequency difference correspondence different pressure, measures the pressure with the frequency difference method, may eliminate </p><p>　　American Silicon Microstructure Inc.(SMI) the company develops a

38、 series of low ends, linear in 0.1% to 0.In 65% scope silicon micro pressure transmitter, the lowest full measuring range is 0.15psi (1KPa), it makes take the silicon as the material, has the unique three dimensional str

39、ucture, the light slight machine-finishing, makes the wheat stone bridge many times with the etching on the silicon diaphragm, when above silicon chip stress, it has the distortion, the resistance produces presses th<

40、/p><p>　　Such silicon micro sensor is the front technology which now the sensor develops, Its essential feature is the sensitive unit volume is a micron magnitude, Is the traditional sensor several dozens, seve

41、ral 1%. In aspect and so on industry control, aerospace domain, biomedicine has the vital role, like on the airplane the use may reduce the airplane weight, reduces the energy. Another characteristic is can be sensitive

42、is small surveyed, may make the blood pressure pressure transmitter.</p><p>　　The Chinese aviation main corporation Beijing observation and control technical research institute, the development CYJ series sp

43、lashes thanks the membrane pressure transmitter is uses the ion sputtering craft to process the metal strain gauge, it has over come the nonmetallic strain gauge easily the temperature influence insufficiency, has the hi

44、gh stability, is suitable in each kind of situation, is measured the medium scope widely, but also overcame the tradition lowly to glue the precision w</p><p>　　Integrates the sensor the superiority is the t

45、raditional sensor is unable to achieve, it is a simple sensor not merely, it in at the same time the auxiliary circuit part and send the part will integrate on together the chip, will cause it to have the calibration, to

46、 compensate, from the diagnosis and the network correspondence function, it might reduce the cost, the gain in yield, this kind of blood pressure sensor which American LUCAS, NOVASENSOR Corporation will develop, each wee

47、k will be able</p><p>　　The intellectualized sensor is one kind of belt microprocessor sensor, is achievement which the microcomputer and the sensor unifies, it has at the same time the examination, the judg

48、ment and the information processing function, compares with the traditional sensor has very many characteristics:</p><p>　　Has the judgment and the information processing function, can carry on the revision,

49、 the error to the observed value compensates, thus enhancement measuring accuracy; May realize the multi-sensor multi parameters survey; Has from the diagnosis and from the calibration function, enhances the reliability;

50、 The survey data may deposit and withdraw, easy to operate; Has the data communication interface, can and the microcomputer direct communication.</p><p>　　The sensor, the signal adjustment electric circuit,

51、the monolithic integrated circuit integration forms ultra large-scale integrated on a chip the senior intelligence sensor. American HONY WELL Corporation ST-3000 intelligence sensor, the chip size only then has 3×4&

52、#215;2mm3, uses the semiconductor craft, makes CPU, EPROM, the static pressure, the differential pressure, the temperature on the identical chip and so on three kind of sensitive units.</p><p>　　The intellec

53、tualized sensor research and the development, US is at the leading position. American Space Agency when development spaceship called this kind of sensor for the clever sensor (Smart Sensor), on the spaceship this kind of

54、 sensor is extremely important. Our country in this aspect research and development also very backward mainly is because our country semiconductor integrated circuit technological level is limited.</p><p>　　

55、The sensor’s development is changing day after day since especially the 80's humanities have entered into the high industrialization the information age, sensor techno-logy to renewal, higher technological developmen

56、t. US, Japan and so on developed country sensor technological development quickest, our country because the foundation is weak, the sensor technology compares with these developed countries has the big disparity. Therefo