1、外文原文：外文原文：Futureofmicroelectromechanicalsystems(MEMS)MinhangBaoaWeiyuanWangb?FudanUniversityShanghai.200433ChinabShanghaiInstituteofMetallurgy.Shanghai.200050ChinaAbstractThedevelopmentofmicroelectromechanicalsystems(MEM

2、S)basedonmicromachiningmicroelectronicstechnologieshasbeensignificantfalmostadecade.Howeveritisunrealistictoconsidermicromachiningtechnologyasamicroversionofconventionalmachiningtechnology.Asamatteroffactmicromachiningte

3、chnologystemmedfromtheplanartechnologyofsiliconisbasicallyatwo.dimensionalprocessingtechnology.Ontheotherhitisobviousthatamicromachinecannotcomparewithaconventionalmachineinstrengthpower.FthesuccessfuldevelopmentofMEMSin

4、thefutureasimpleruleissuggestedbytheexperiencegainedinthepastfewyears:trytoavoidasmuchaspossiblemechanicalcouplingwiththeoutsidewldwhiletryinghardtoimprovetheMEMStechnologytoenhancethemechanicalpowerofthedevices.Inadditi

5、ontothatthestrategyproventobecrectfthedevelopmentofsolidstatesenssalsoapplies:MEMSdevicesshouldmainlybedevelopedfnewapplicationswithavastmarket.Theirsubstitutionftraditionalapplicationsshouldnotbeconsideredasamainstrateg

6、yofdevelopment.BasedontheseargumentsthefuturedevelopmentofMEMSdevicestechnologiesisfurtherdiscussedinthepaper.1.ThedevelopmentofMEMSOnthefrontcoveroftheearlierissuesofthisjournal(SenssActuats)therewasasubtitlejustunderth

7、emaintitlewhichread:internationaljournaldevotedtotheresearchdevelopmentofsolidstatetransducers[1].TheseplainwdsmeantousthatthefounderofthejournalProfessSimondelhoekfesawtheemergenceofsolidstateactuatstherefemicivelecisom

8、echaaicalsystems(i.e.MEMS)fromtheverybeginningofthelastdecade.AsMEMSareanintegrationofmicromachiningtechnologymicroelectronics(IC)technologytheyemergedsoonaftertheadventofthemicromachinein1987.ThedevelopmentofMEMSfalmost

9、onedecadehasbeensignificant:variousnewtechniqueshavebeendevelopednumerousnewdeviceshavebeendesignedfabricatedwithsomeofthembeingcommercializedresearchonMEMShasbeenconductedbyalmostallmajuniversitiesresearchinstitutionsen

10、joyingwidesupptfromindustriesgovernmentagencies.Thefieldhasbeendescribedasgrowingintoacredibledynamicpopularadolescencefromanuncertainchildinlessthanadecade[4].Buteverysilverlininghasacloudthiscasewasnoexception.Someprob

11、lemsdevelopedduringtherapiddevelopmenttoo.Therapidappearanceofnewmicromachinesstirreduphighexpectationsfromthescientificcommunitiesevenpublicnewsmedia.Sometendedtobelievethatthemostsophisticatedelectromechanicalsystemlik

12、earobotcanbecopiedintoamicroversionthemicromachinecanstilldoasimilarjobtoitsmacrocounterparts.Therehaveaoobeenoutrageouspredictionslikemicrobotsgatheringupradioactiveparticlesattoxicsitesmicrosubmarinesstalkingattackingv

13、irusescancerouscellswhileswimmingthroughthebloodsueam.Therealdevelopmentcanhardlymatchsuchadevelopmentpatternfromthenewsmedia.Thoughmicromotshavebeendesignedfabricatedonebyonetheyrunintothecommonproblemofsmalltquerelativ

14、elylargefrictiononthemicronscale.Peopleareusuallyexcitedsimplybythefunctioningofamicromotnotbeingabletoexpecttoomuchinterms:~ftquepoweroutput.Itseemsimpracticaltoputthemintouselikeaconventionalmachine.Sofarnomicromachine

15、canreplaceaconventionalmachineinanypracticalapplication.ThissituationhasgivenrisetoascepticalcloudoverthefutureofMEMS.Howeverapplicationisalwaysthefinaldrivingfcefanyemergingtechnology.Startingatthebeginningofthisdecadet