1、洳≥等≥～碩士學位論文論文題目筮電邀墓壁篚槿型魈差鍵羹趟撞苤嬰塞作者姓名籃互—盟——指導教師廛盎型墼撞——學科(專業(yè))扭撼劍堡區(qū)甚自動垡所在學院墊叢生絲煎三壟堂瞳提交自期三委委五生三旦ABSTRACTMicroelectromechanicalsystem(MEMS)consistofmicro—sensor，micro—actuator，controlandsignalprocessingcircuitMEMSisextensiono

2、fmicro。electronicstechnologyIt。on“。。tmicroelectrol3icswithprecisiunmeehnicatprocesstechnologyandunitemicro。electronic，ICandmechanicstobeasystemWecanverifyandcompareatthestagefromdesigntomanufacturebymodellngandsimulation

3、，whichcarloptimizedesignofMEMSdevices，verifythevalidityofinanufaCtUteandprocessOnthebasisofcountrynaturalsciencefund”MEMSraodelingandapplictafionbasingonFEMterminalbehavior’’fauthorizationnumber：50105020)，westartourresea

4、rchEquivalentcircuitmodelingtechniquedecomposesMEMSintosimpledevices，thenconstructsdevice‘mod。1withaeauiraIentcircuitAtlast，equivalentcircuitofsystemsisformedbyconnectingeachdevice，seqLIivalentcircuitThistechniquereprese

5、ntsthesystem—physicalcharacteristicandcanaDpliedonanyMEMSBut，F(xiàn)indingequivalentcircuitsisverydifficult，andequivalentdevicesarelimjtedbvSPICElibraryWeresealch[】lekeyfoundationaltechnologyusingANSYS，andsfLldvtheeffectofvm‘i

6、ousprocessparametersTiremainreseal’chworksasfollows：I、Analyzi】1￡themacromodelingofnodalmacro—model，lumpednetworkmacro。modelandHDLmacro。model，pointingouttlleshortnessofthesemethods2、Deduill2thetwodifferentmethodsofequival

7、entcircuits：Fv1FIEquivalentcjrcultmacIlo—modelofmechanicai，dectricscoupdngclamped—clampedbeamisbttiltusingFVFImethodsAIso。weexhibithowtobuildaequivalentcircuitofafluidpJ’oblem3、TheDheno]menaofelectrostaticallypull—inisaf

8、amousinstablewededucedclose“formex口lessiDnofelectrostaticallyactuationPu】involtage，andstudytheelectrostaticalpull—inphenomenaotclamped—crampedbeam4、Tal(ingtl]eelectrostaticmicropumpforexample，themiel’opumpwasanalyzedbyAN

9、SYSStaticbehavioranddynamicbehaviorwasobservedUsingsequentiallycoupledphysicsanalysis，wesetupDhysicsenvironmelltstomechanics，electl。staticandfluid，andcalculatecoupleofthreedifferentfieldsTheeffectofprimaryparameterswel‘e