1、大連理工大學碩士學位論文射頻感應耦合等離子體調諧基片自偏壓特性的實驗研究姓名：霍偉剛申請學位級別：碩士專業(yè)：等離子體物理指導教師：丁振峰20050601射頻感應耦合等離子體調諧基片自偏壓特性的實驗研究CharacteristicsofthetunedsubstrateselfbiasinaRFinductivelycoupledplasmaAbs仃actTheresearchgroupfirstperformsimprovementso

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4、FvoltsrespectivelyWealsostudyandmodifytheRFLangmuirprobe，Byaddingtuningcircuit，theinterferenceofprobemeasurementcausedbythe1356刪ZsignaliSdecreasedDuringthecourseofmeasurementtheproblemofprobetinepollutioncausedbyimpurity

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