1、哈爾濱工業(yè)大學碩士學位論文近場光學顯微系統(tǒng)設計及基于剪切力方法測控距離的研究姓名：秦靜申請學位級別：碩士專業(yè)：儀器科學與技術指導教師：張健20050601AbstractNearfieldOpticsisanewcrossedknowledgeIthasgreatdifferenceincharacteristicwiththegeneralopticsNowadays，scanningnearfieldmicroscope(SNOM)

2、breaksthroughtheresolutiondiffractionlimitoftraditionalopticalmicroscope，evenhasthesameresolutionwiththeSTM(ScanningTunnelMicroscope)andAFM(AtomForceMicroscope)，isproposedandcarriedoutforitsstrongpointofinformationtransm

3、issionusingphotonsItreleasestherestrictiontosamples，suchaselectricsamples，vacuumenvironmentandmoredamagetosamplesForthisreason，SNOMwillmakegreatsenseindetectingliveorganism，LSIandSOonSNOMisaintegrativemeasuringinstrument

4、usingtheknowledgeofmechanics，electricsandopticsInthispaperasimpleSNOMisdesignedandsetupSomeexperimentsanddataanalyseshavebeendonetoconfirmthefeasibilityofthemethod：thecontrolofthetip—sampledistanceusingthemethodofshearfo

5、rce，whichispresentedastheresonatedprobeapproachingthesampleTuningfork，asasensortodetectthevibrationofthefiberprobefurthermorecontrolthez—pztgettingclosetotheprobeExperimentsaredonetodeterminetheoptimumpositionrelationshi

6、pbetweenprobeandtuningforkinordertogetcorrespondin91ybigQfactorsInaddition，theprobeisinsertedintotheslitoftuningforkinsteadofsticktothetuningfork，foritismorereplaceableandhasbiggerQWithregardtotherealizationofthehardware

7、，alightsource，opticalfiberprobe，fibercoupler，tuningfork，threedimensionsmotoringstage，PZT’CCD，AD／DAcard，PMTimageprocessingcarandlensandSOonareusedtosetupthissystemIntherealizationofthesoftware，weadopttheserialdatatransfer

8、ringtocommunicatewithalltheinstrumentsInaddition，wecanfinishthewholedetectionprocessinanintegratedsoRwarewhichisdevelopedintheenvironmentofVisualC60DatareadingandanalyzingcanalsobedoneTheexistenceofnearfieldiSconfirmedTh